A piezoelectric-on-silicon width-extensional mode Lorentz force resonant MEMS magnetometer

S. Ghosh^*
, J. E.-Y. Lee

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

17 Citations (Scopus)

1 results

Finished
GRF: VHF Piezoelectric Aluminum Nitride on Silicon Lamb Wave Mode Micromechanical Lorentz Force Magnetometers
LEE, E.-Y. J. (Principal Investigator / Project Coordinator)
1/01/17 → 3/06/21
Project: Research