A Novel Terahertz Waveguide Filter Based on MEMS Technology

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publication2019 IEEE MTT-S International Wireless Symposium (IWS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728107165
ISBN (Print)9781728107172
Publication statusPublished - May 2019

Conference

TitleSixth IEEE MTT-S International Wireless Symposium (IEEE IWS 2019)
LocationGuangzhou Baiyun International Convention Center
PlaceChina
CityGuangzhou
Period19 - 22 May 2019

Abstract

This paper presents high performance 0.34THz waveguide filters based on MEMS technology. The relationship between fabrication error and filter performance was studied and a quantitative model is given. The fabrication geometrical tolerance can be controlled to be lower than 5% for iris structures (and ±5μm for resonant cavities). Our test results show a good agreement with simulation results when fabrication error is less than ~5 μm, the test result shows a performance of ~0.5dB insertion with ~5.29% relative bandwidth. © 2019 IEEE

Research Area(s)

  • MEMS, THz, Waveguides

Citation Format(s)

A Novel Terahertz Waveguide Filter Based on MEMS Technology. / Shan, G. C.; Zhang, N.; Yan, Z.; Shek, C. H.

2019 IEEE MTT-S International Wireless Symposium (IWS). Institute of Electrical and Electronics Engineers Inc., 2019. 8803867.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review