A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 to 360

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

13 Scopus Citations
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Author(s)

  • Shudong Wang
  • Xueyong Wei
  • Yinsheng Weng
  • Yulong Zhao
  • Zhuangde Jiang

Detail(s)

Original languageEnglish
Article number346
Journal / PublicationSensors (Switzerland)
Volume18
Issue number2
Online published25 Jan 2018
Publication statusPublished - Feb 2018
Externally publishedYes

Link(s)

Abstract

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002° in the whole measurement range from 0 to 360.

Research Area(s)

  • Double-ended tuning fork, MEMS, Oscillator, Resonator, Tilt sensor

Citation Format(s)

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 to 360. / Wang, Shudong; Wei, Xueyong; Weng, Yinsheng et al.
In: Sensors (Switzerland), Vol. 18, No. 2, 346, 02.2018.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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