A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

Yantao Shen; Ning Xi; King W. C. Lai; Wen J. Li

doi:10.1108/02602280410545407

A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

Yantao Shen, Ning Xi, King W. C. Lai, Wen J. Li

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

36 Citations (Scopus)

Abstract

This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real-time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub-micronewtons can be applied effectively to develop a technology on the force-reflection microassembly of surface MEMS structures, in addition, a tele-micromanipulation platform, which can be used to perform tele-microassembly of the MEMS structures and tele-cell-manipulation with force/haptic feedback via Internet was also built successfully.

Original language	English
Pages (from-to)	274-283
Journal	Sensor Review
Volume	24
Issue number	3
DOIs	https://doi.org/10.1108/02602280410545407
Publication status	Published - 2004
Externally published	Yes

Research Keywords

Assembly
Force
Microsensors

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "A novel PVDF microforce/force rate sensor for practical applications in micromanipulation",

abstract = "This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real-time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub-micronewtons can be applied effectively to develop a technology on the force-reflection microassembly of surface MEMS structures, in addition, a tele-micromanipulation platform, which can be used to perform tele-microassembly of the MEMS structures and tele-cell-manipulation with force/haptic feedback via Internet was also built successfully.",

keywords = "Assembly, Force, Microsensors",

author = "Yantao Shen and Ning Xi and Lai, {King W. C.} and Li, {Wen J.}",

year = "2004",

doi = "10.1108/02602280410545407",

language = "English",

volume = "24",

pages = "274--283",

journal = "Sensor Review",

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T1 - A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

AU - Shen, Yantao

AU - Xi, Ning

AU - Lai, King W. C.

AU - Li, Wen J.

PY - 2004

Y1 - 2004

N2 - This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real-time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub-micronewtons can be applied effectively to develop a technology on the force-reflection microassembly of surface MEMS structures, in addition, a tele-micromanipulation platform, which can be used to perform tele-microassembly of the MEMS structures and tele-cell-manipulation with force/haptic feedback via Internet was also built successfully.

AB - This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real-time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub-micronewtons can be applied effectively to develop a technology on the force-reflection microassembly of surface MEMS structures, in addition, a tele-micromanipulation platform, which can be used to perform tele-microassembly of the MEMS structures and tele-cell-manipulation with force/haptic feedback via Internet was also built successfully.

KW - Assembly

KW - Force

KW - Microsensors

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-4143153720&origin=recordpage

U2 - 10.1108/02602280410545407

DO - 10.1108/02602280410545407

M3 - RGC 21 - Publication in refereed journal

SN - 0260-2288

VL - 24

SP - 274

EP - 283

JO - Sensor Review

JF - Sensor Review

IS - 3

ER -

A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

Abstract

Research Keywords

UN SDGs

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