A Novel MEMS force sensor based on laterally movable gate array field effect transistor(LMGAFET)
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. |
| Pages | 723-727 |
| ISBN (electronic) | 9781509030590 |
| Publication status | Published - Aug 2017 |
Publication series
| Name | IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
|---|---|
| Publisher | IEEE |
| ISSN (electronic) | 2474-3755 |
Conference
| Title | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
|---|---|
| Location | UCLA |
| Place | United States |
| City | Los Angeles |
| Period | 9 - 12 April 2017 |
Link(s)
Abstract
In this research, we propose a novel MEMS sensor based on Laterally Movable Gate Array Field Effect Transistor (LMGAFET) for the measurement of nN force. By designing an array structure and adopting reasonable parameters and utilizing modified MOS3 model, the sensor's proved to have high sensitivity of 0.107 mA/nN, low cross-Axis sensitivity and excellent linearity. Besides, a modified MOS3 model is presented and utilized to demonstrate operation behavior of the sensor. This sensor with the ability of measuring nN force can be widely used in evaluate biophysical properties measurement of cells or tissues.
Research Area(s)
- biophysical properties measurement, FET, force sensor, MEMS
Citation Format(s)
A Novel MEMS force sensor based on laterally movable gate array field effect transistor(LMGAFET). / Gao, Wendi; Zhao, Libo; Jiang, Zhuangde et al.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Institute of Electrical and Electronics Engineers, Inc., 2017. p. 723-727 8017122 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)).
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Institute of Electrical and Electronics Engineers, Inc., 2017. p. 723-727 8017122 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)).
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
