A Novel Fabrication and Properties Investigation of Permalloy-SiO2 Granular Films with Induced Anisotropy

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)491-495
Journal / PublicationMaterials Letters
Volume61
Issue number2
Online published16 May 2006
Publication statusPublished - Jan 2007
Externally publishedYes

Abstract

Permalloy-SiO2 (PS) granular films with various metallic volume fraction (xV) have been fabricated by non-continuum multilayer alternate sputtering with different power to generate appropriate controllable anisotropy and control the microstructure precisely. Transmission Electron Microscopy (TEM) investigation shows that the PS granular films consist of Permalloy crystalline nano-sized granules embedded in amorphous SiO2 matrix. The films exhibit excellent soft magnetic properties and high resistivity because of the unique microstructure and composition variety, both of which have been controlled by adjusting the preparation conditions. Soft magnetic properties of the films are improved with increasing metallic xV and sputtering power, while resistivity of the films goes down with increasing xV and sputtering power. Furthermore, the controllable anisotropy generated in alternated sputtering process is applicable to integrated planar magnetic inductor which operates in the range of Radio Frequency (RF) for device performance enhancement. © 2006 Elsevier B.V. All rights reserved.

Research Area(s)

  • Alternated sputtering, Deposition, Granular films, High resistivity, Magnetic anisotropy, Soft magnetic

Citation Format(s)

A Novel Fabrication and Properties Investigation of Permalloy-SiO2 Granular Films with Induced Anisotropy. / Zhao, Jiahao; Zhu, Jing; Zhong, Xiaoyan et al.
In: Materials Letters, Vol. 61, No. 2, 01.2007, p. 491-495.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review