A Novel Fabrication and Properties Investigation of Permalloy-SiO2 Granular Films with Induced Anisotropy

Jiahao Zhao; Jing Zhu; Xiaoyan Zhong; DingRong Ou; Huihua Zhou

doi:10.1016/j.matlet.2006.04.104

Author(s)

Jiahao Zhao
Jing Zhu
Xiaoyan Zhong
DingRong Ou
Huihua Zhou

Detail(s)

Original language	English
Pages (from-to)	491-495
Journal / Publication	Materials Letters
Volume	61
Issue number	2
Online published	16 May 2006
Publication status	Published - Jan 2007
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1016/j.matlet.2006.04.104 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-34547451965&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(9629ead5-404c-4fc0-94f9-7425207d54b3).html

Abstract

Permalloy-SiO₂ (PS) granular films with various metallic volume fraction (x_V) have been fabricated by non-continuum multilayer alternate sputtering with different power to generate appropriate controllable anisotropy and control the microstructure precisely. Transmission Electron Microscopy (TEM) investigation shows that the PS granular films consist of Permalloy crystalline nano-sized granules embedded in amorphous SiO₂ matrix. The films exhibit excellent soft magnetic properties and high resistivity because of the unique microstructure and composition variety, both of which have been controlled by adjusting the preparation conditions. Soft magnetic properties of the films are improved with increasing metallic x_V and sputtering power, while resistivity of the films goes down with increasing x_V and sputtering power. Furthermore, the controllable anisotropy generated in alternated sputtering process is applicable to integrated planar magnetic inductor which operates in the range of Radio Frequency (RF) for device performance enhancement. © 2006 Elsevier B.V. All rights reserved.

Research Area(s)

Alternated sputtering, Deposition, Granular films, High resistivity, Magnetic anisotropy, Soft magnetic

Citation Format(s)

[ RIS ] [ BibTeX ]

A Novel Fabrication and Properties Investigation of Permalloy-SiO₂ Granular Films with Induced Anisotropy. / Zhao, Jiahao; Zhu, Jing; Zhong, Xiaoyan et al.
In: Materials Letters, Vol. 61, No. 2, 01.2007, p. 491-495.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Zhao, J, Zhu, J, Zhong, X, Ou, D & Zhou, H 2007, 'A Novel Fabrication and Properties Investigation of Permalloy-SiO₂ Granular Films with Induced Anisotropy', Materials Letters, vol. 61, no. 2, pp. 491-495. https://doi.org/10.1016/j.matlet.2006.04.104

Zhao, J., Zhu, J., Zhong, X., Ou, D., & Zhou, H. (2007). A Novel Fabrication and Properties Investigation of Permalloy-SiO₂ Granular Films with Induced Anisotropy. Materials Letters, 61(2), 491-495. https://doi.org/10.1016/j.matlet.2006.04.104

Zhao J, Zhu J, Zhong X, Ou D, Zhou H. A Novel Fabrication and Properties Investigation of Permalloy-SiO₂ Granular Films with Induced Anisotropy. Materials Letters. 2007 Jan;61(2):491-495. Epub 2006 May 16. doi: 10.1016/j.matlet.2006.04.104

Zhao, Jiahao ; Zhu, Jing ; Zhong, Xiaoyan et al. / A Novel Fabrication and Properties Investigation of Permalloy-SiO₂ Granular Films with Induced Anisotropy. In: Materials Letters. 2007 ; Vol. 61, No. 2. pp. 491-495.