TY - GEN
T1 - A new two-axis micro coupler utilizing controllable moving wall and membrane structures for on-chip R optical detection applications
AU - Lai, Chia-Wei
AU - Hsiung, Suz-Kai
AU - Lee, Gwo-Bin
N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].
PY - 2007
Y1 - 2007
N2 - Optical detection technique is critical for biomedical applications. The technique for optical fiber coupling is crucial for many optical detection applications. This study reports a new active two-axis micro coupler for buried optical fibers, which are commonly used for on-chip optical detection in microfluidic systems. The active micro coupler comprising air chambers, optical fiber channels, and controllable moving wall and membrane structures was fabricated by using micro electro-mechanical-systems technology. By adjusting air pressures to control the deflection of the pneumatic chambers placed orthogonal to and underneath optical fiber channels, precise alignment of buried head-on optical fibers can be achieved, which is crucial for on-line optical detection. Experimental results showed that the maximum deformation can be as high as 13μm at an applied pressure of 40 psi for one air chamber, which is sufficient for precise coupling of two-axis optical fibers. The proposed device is promising for applications of head-on input/output fibers for the on-line optical analysis. It can be easily integrated with micro capillary electrophoresis or micro flow cytometer chips for DNA, protein and cell studies. © 2007 IEEE.
AB - Optical detection technique is critical for biomedical applications. The technique for optical fiber coupling is crucial for many optical detection applications. This study reports a new active two-axis micro coupler for buried optical fibers, which are commonly used for on-chip optical detection in microfluidic systems. The active micro coupler comprising air chambers, optical fiber channels, and controllable moving wall and membrane structures was fabricated by using micro electro-mechanical-systems technology. By adjusting air pressures to control the deflection of the pneumatic chambers placed orthogonal to and underneath optical fiber channels, precise alignment of buried head-on optical fibers can be achieved, which is crucial for on-line optical detection. Experimental results showed that the maximum deformation can be as high as 13μm at an applied pressure of 40 psi for one air chamber, which is sufficient for precise coupling of two-axis optical fibers. The proposed device is promising for applications of head-on input/output fibers for the on-line optical analysis. It can be easily integrated with micro capillary electrophoresis or micro flow cytometer chips for DNA, protein and cell studies. © 2007 IEEE.
UR - https://www.scopus.com/pages/publications/52249116534
UR - https://www.scopus.com/pages/publications/52249116534#tab=impact
U2 - 10.1109/memsys.2007.4432982
DO - 10.1109/memsys.2007.4432982
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 429
EP - 432
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -