A New Technique for Plasma Immersion Ion Implantation of Cylindrical Bore Based on Self-Excited radio-Frequency Glow Discharge

C. Z. Gong; X. B. Tian; Z. T. Zhu; S. Q Yang; P. K. Chu

A New Technique for Plasma Immersion Ion Implantation of Cylindrical Bore Based on Self-Excited radio-Frequency Glow Discharge

C. Z. Gong
, X. B. Tian
, Z. T. Zhu
, S. Q Yang
, P. K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 7 Sept 2009
Event	10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009) - São José dos Campos, Brazil Duration: 7 Sept 2009 → 11 Sept 2009

Conference

Conference	10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009)
Abbreviated title	PBII&D 2009
Place	Brazil
City	São José dos Campos
Period	7/09/09 → 11/09/09

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@conference{55f87e8b34444eeb866d1979caed9572,

title = "A New Technique for Plasma Immersion Ion Implantation of Cylindrical Bore Based on Self-Excited radio-Frequency Glow Discharge",

author = "Gong, \{C. Z.\} and Tian, \{X. B.\} and Zhu, \{Z. T.\} and Yang, \{S. Q\} and Chu, \{P. K.\}",

year = "2009",

month = sep,

day = "7",

language = "English",

note = "10th International Workshop on Plasma-Based Ion Implantation \& Deposition (PBII\&D 2009), PBII\&D 2009 ; Conference date: 07-09-2009 Through 11-09-2009",

}

A New Technique for Plasma Immersion Ion Implantation of Cylindrical Bore Based on Self-Excited radio-Frequency Glow Discharge. / Gong, C. Z.; Tian, X. B.; Zhu, Z. T. et al.
2009. Paper presented at 10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009), São José dos Campos, Brazil.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - A New Technique for Plasma Immersion Ion Implantation of Cylindrical Bore Based on Self-Excited radio-Frequency Glow Discharge

AU - Gong, C. Z.

AU - Tian, X. B.

AU - Zhu, Z. T.

AU - Yang, S. Q

AU - Chu, P. K.

PY - 2009/9/7

Y1 - 2009/9/7

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009)

Y2 - 7 September 2009 through 11 September 2009

ER -