A new nucleation method by electron cyclotron resonance enhanced microwave plasma chemical vapor deposition for deposition of (001)-oriented diamond films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

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Material Science

Nucleation Material Science

Diamond Films Material Science

Chemical Vapor Depo... Material Science

Silicon Material Science

Raman Spectroscopy Material Science

Surface Morphology Material Science

Scanning Electron M... Material Science

Keyphrases

Electron Cyclotron ... Keyphrases

Diamond Film Keyphrases

Microwave Plasma Ch... Keyphrases

Bias Enhanced nucle... Keyphrases

Raman Spectroscopy Keyphrases

Chemical Vapor Depo... Keyphrases

Phase Purity Keyphrases

Scanning Electron M... Keyphrases

Nucleation Mechanis... Keyphrases

Order of Magnitude Keyphrases

Surface Morphology Keyphrases

Silicon Substrate Keyphrases

Microwave Plasma Keyphrases

Surface Phase Keyphrases

INIS

chemical vapor depo... INIS

deposition INIS

nucleation INIS

electron cyclotron-... INIS

microwave radiation INIS

raman spectroscopy INIS

substrates INIS

scanning electron m... INIS

morphology INIS

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