A new method for evaluating the scratch resistance of diamond-like carbon films by the nano-scratch technique

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Author(s)

  • Li-Ye Huang
  • Jun-Wu Zhao
  • Ke-Wei Xu
  • Jian Lu

Detail(s)

Original languageEnglish
Pages (from-to)1454-1459
Journal / PublicationDiamond and Related Materials
Volume11
Issue number7
Publication statusPublished - Jul 2002
Externally publishedYes

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-0036645507&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(4059f165-6349-484b-9a87-c79733fe4f6c).html

Abstract

The nano-scratch technique was used as the method to evaluate the scratch resistance of diamond-like carbon films/Si composite systems. The nano-scratch behavior of DLC films on silicon substrates was analyzed to observe if this technique could be satisfactory used for characterizing the scratch properties of DLC films. The experimental results showed that, during loading, the indent depth linearly increased with increasing normal load, up to the loading critical load (LcL). After unloading, the films successively displayed fully elastic recovery, plastic deformation and delaminating processes with increasing load, and the unloading critical load (LcU) was determined, which was less than LcL in the present test. Therefore, the nano-scratch test not only obtained the cracking resistance (LcL) characterizing the cohesion strength of films during loading, but also determined the LcU related to the adhesion strength of the film and the substrate during unloading. As a result, the nano-scratch test was a suitable method to evaluate the scratch properties of DLC films/Si composite systems. © 2002 Elsevier Science B.V. All rights reserved.

Research Area(s)

  • Atomic force microscopy (AFM), Diamond-like carbon (DLC), Nano-scratch, Nanoindentation, Thin films

Fingerprint

Publication fingerprints text

100
Diamond-like Keyphrases
100
Carbon Film Keyphrases
100
Scratch Resistance Keyphrases
100
Nanoscratch Keyphrases
100
DLC Film Keyphrases
100
Film Material Science
100
Diamond Like Carbon... Material Science
100
films INIS
100
carbon INIS
100
diamonds INIS
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Citation Format(s)

[ RIS ] [ BibTeX ]
A new method for evaluating the scratch resistance of diamond-like carbon films by the nano-scratch technique. / Huang, Li-Ye; Zhao, Jun-Wu; Xu, Ke-Wei et al.
In: Diamond and Related Materials, Vol. 11, No. 7, 07.2002, p. 1454-1459.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review