A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis

Ming-Chang Hsu; Gwo-Bin Lee

doi:10.1109/NEMS.2013.6559707

A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis

Ming-Chang Hsu
, Gwo-Bin Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

Miniaturized sensors have been demonstrated by micromachining technology since late 1980s. Recently, carbon-nanotubes (CNTs) have been extensively explored for a variety of applications since they have unique electrical and exceptional mechanical properties, which may be excellent candidate for nano-sensors. Conductors or semiconductors can be formed with different length and diameters of CNT, multi-walled carbon nanotubes (MWCNTs) and single-walled carbon nanotubes (SWCMTs). Optically-induced dielectrophoresis (ODEP) technique has been demonstrated to manipulate microparticles by illuminating optical patterns on a photoconductive material. The ODEP chip was formed with indium-tin-oxide (ITO) and photoconductive amorphous silicon (a-Si). When the light was illuminated on a-Si, it could produce non-uniform electric field and generate ODEP force. In this study, CNTs were collected between two gold electrodes by ODEP force. The pre-assembled CNTs line was further immobilized by illuminated ultraviolet light. Then, the cured polymer was ashed by the oxygen plasma. After aligning CNTs between Au electrodes, the CNTs line can be used for sensing air flow velocities while operated at a constant-current mode. A CNT-based hot-film sensor was therefore successfully demonstrated in this study. This technique can be easily extended for mass-production of CNT-based hot-film sensors by using the capability of ODEP platform. © 2013 IEEE.

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages	171-174
DOIs	https://doi.org/10.1109/NEMS.2013.6559707
Publication status	Published - 2013
Externally published	Yes
Event	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013

Publication series

Name	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Conference

Conference	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Place	China
City	Suzhou
Period	7/04/13 → 10/04/13

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

Carbon nanotubes
dielectrophoresis
hot-film sensors
optically-induced dielectrophoresis
photoconductive material

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10.1109/NEMS.2013.6559707

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Cite this

Hsu, M.-C., & Lee, G.-B. (2013). A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 171-174). Article 6559707 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559707

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title = "A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis",

abstract = "Miniaturized sensors have been demonstrated by micromachining technology since late 1980s. Recently, carbon-nanotubes (CNTs) have been extensively explored for a variety of applications since they have unique electrical and exceptional mechanical properties, which may be excellent candidate for nano-sensors. Conductors or semiconductors can be formed with different length and diameters of CNT, multi-walled carbon nanotubes (MWCNTs) and single-walled carbon nanotubes (SWCMTs). Optically-induced dielectrophoresis (ODEP) technique has been demonstrated to manipulate microparticles by illuminating optical patterns on a photoconductive material. The ODEP chip was formed with indium-tin-oxide (ITO) and photoconductive amorphous silicon (a-Si). When the light was illuminated on a-Si, it could produce non-uniform electric field and generate ODEP force. In this study, CNTs were collected between two gold electrodes by ODEP force. The pre-assembled CNTs line was further immobilized by illuminated ultraviolet light. Then, the cured polymer was ashed by the oxygen plasma. After aligning CNTs between Au electrodes, the CNTs line can be used for sensing air flow velocities while operated at a constant-current mode. A CNT-based hot-film sensor was therefore successfully demonstrated in this study. This technique can be easily extended for mass-production of CNT-based hot-film sensors by using the capability of ODEP platform. {\textcopyright} 2013 IEEE.",

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author = "Ming-Chang Hsu and Gwo-Bin Lee",

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language = "English",

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Hsu, M-C & Lee, G-B 2013, A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559707, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 171-174, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559707

A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis. / Hsu, Ming-Chang; Lee, Gwo-Bin.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 171-174 6559707 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

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AU - Hsu, Ming-Chang

AU - Lee, Gwo-Bin

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2013

Y1 - 2013

N2 - Miniaturized sensors have been demonstrated by micromachining technology since late 1980s. Recently, carbon-nanotubes (CNTs) have been extensively explored for a variety of applications since they have unique electrical and exceptional mechanical properties, which may be excellent candidate for nano-sensors. Conductors or semiconductors can be formed with different length and diameters of CNT, multi-walled carbon nanotubes (MWCNTs) and single-walled carbon nanotubes (SWCMTs). Optically-induced dielectrophoresis (ODEP) technique has been demonstrated to manipulate microparticles by illuminating optical patterns on a photoconductive material. The ODEP chip was formed with indium-tin-oxide (ITO) and photoconductive amorphous silicon (a-Si). When the light was illuminated on a-Si, it could produce non-uniform electric field and generate ODEP force. In this study, CNTs were collected between two gold electrodes by ODEP force. The pre-assembled CNTs line was further immobilized by illuminated ultraviolet light. Then, the cured polymer was ashed by the oxygen plasma. After aligning CNTs between Au electrodes, the CNTs line can be used for sensing air flow velocities while operated at a constant-current mode. A CNT-based hot-film sensor was therefore successfully demonstrated in this study. This technique can be easily extended for mass-production of CNT-based hot-film sensors by using the capability of ODEP platform. © 2013 IEEE.

AB - Miniaturized sensors have been demonstrated by micromachining technology since late 1980s. Recently, carbon-nanotubes (CNTs) have been extensively explored for a variety of applications since they have unique electrical and exceptional mechanical properties, which may be excellent candidate for nano-sensors. Conductors or semiconductors can be formed with different length and diameters of CNT, multi-walled carbon nanotubes (MWCNTs) and single-walled carbon nanotubes (SWCMTs). Optically-induced dielectrophoresis (ODEP) technique has been demonstrated to manipulate microparticles by illuminating optical patterns on a photoconductive material. The ODEP chip was formed with indium-tin-oxide (ITO) and photoconductive amorphous silicon (a-Si). When the light was illuminated on a-Si, it could produce non-uniform electric field and generate ODEP force. In this study, CNTs were collected between two gold electrodes by ODEP force. The pre-assembled CNTs line was further immobilized by illuminated ultraviolet light. Then, the cured polymer was ashed by the oxygen plasma. After aligning CNTs between Au electrodes, the CNTs line can be used for sensing air flow velocities while operated at a constant-current mode. A CNT-based hot-film sensor was therefore successfully demonstrated in this study. This technique can be easily extended for mass-production of CNT-based hot-film sensors by using the capability of ODEP platform. © 2013 IEEE.

KW - Carbon nanotubes

KW - dielectrophoresis

KW - hot-film sensors

KW - optically-induced dielectrophoresis

KW - photoconductive material

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BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

T2 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Y2 - 7 April 2013 through 10 April 2013

ER -

Hsu MC, Lee GB. A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 171-174. 6559707. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). doi: 10.1109/NEMS.2013.6559707

A new carbon nanotube-based hot-film sensor assembled by optically-induced dielectrophoresis

Abstract

Publication series

Conference

Bibliographical note

UN SDGs

Research Keywords

Access Output

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