TY - JOUR
T1 - A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band
T2 - Design and Modeling
AU - Wang, Zuan-Kai
AU - Zong, Deng-Gang
AU - Lu, De-Ren
AU - Xiong, Bin
AU - Wang, Yue-Lin
AU - Bao, Minhang
PY - 2002
Y1 - 2002
N2 - A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.
AB - A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.
KW - Accelerometer
KW - MEMS
KW - Piezoresistive sensor
UR - http://www.scopus.com/inward/record.url?scp=0036319931&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0036319931&origin=recordpage
U2 - 10.1515/IJNSNS.2002.3.3-4.307
DO - 10.1515/IJNSNS.2002.3.3-4.307
M3 - RGC 21 - Publication in refereed journal
SN - 1565-1339
VL - 3
SP - 307
EP - 310
JO - International Journal of Nonlinear Sciences and Numerical Simulation
JF - International Journal of Nonlinear Sciences and Numerical Simulation
IS - 3-4
ER -