A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range

Shudong Wang; Juan Ren; Tianyi Zhang; Yinsheng Weng; Zhuangde Jiang; Xueyong Wei

doi:10.1109/ICSENS.2016.7808792

A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range

Shudong Wang
, Juan Ren
, Tianyi Zhang
, Yinsheng Weng
, Zhuangde Jiang
, Xueyong Wei^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation, and then fabricated through a commercial silicon-on-insulator (SOI)-MEMS foundry process. The measured sensitivity can reach at least 858.6Hz/90° in the full range from 0° to 360°, which verifies the design concept. Based on this preliminary work, the sensitivity of re-designed tilt sensor is expected to reach 1700Hz/90° after an optimization.

Original language	English
Title of host publication	2016 IEEE SENSORS Proceedings
Publisher	IEEE
ISBN (Electronic)	978-1-4799-8287-5
DOIs	https://doi.org/10.1109/ICSENS.2016.7808792
Publication status	Published - Oct 2016
Externally published	Yes
Event	15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: 30 Oct 2016 → 2 Nov 2016

Publication series

Name	Proceedings of IEEE Sensors
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	15th IEEE Sensors Conference, SENSORS 2016
Place	United States
City	Orlando
Period	30/10/16 → 2/11/16

Funding

This project is supported by National Natural Science Foundation of China (51575439 and 51421004), Natural Science Foundation of Shaanxi Province (2014jm2-5054) and 111 project (B12016)

Research Keywords

DETF
MEMS resonant
tilt sensor

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10.1109/ICSENS.2016.7808792

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Cite this

@inproceedings{7bcfea6a90bf4cd8acf1032430d9296e,

title = "A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range",

abstract = "In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation, and then fabricated through a commercial silicon-on-insulator (SOI)-MEMS foundry process. The measured sensitivity can reach at least 858.6Hz/90° in the full range from 0° to 360°, which verifies the design concept. Based on this preliminary work, the sensitivity of re-designed tilt sensor is expected to reach 1700Hz/90° after an optimization.",

keywords = "DETF, MEMS resonant, tilt sensor",

author = "Shudong Wang and Juan Ren and Tianyi Zhang and Yinsheng Weng and Zhuangde Jiang and Xueyong Wei",

year = "2016",

month = oct,

doi = "10.1109/ICSENS.2016.7808792",

language = "English",

series = "Proceedings of IEEE Sensors",

publisher = "IEEE",

booktitle = "2016 IEEE SENSORS Proceedings",

address = "United States",

note = "15th IEEE Sensors Conference, SENSORS 2016 ; Conference date: 30-10-2016 Through 02-11-2016",

}

A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range. / Wang, Shudong; Ren, Juan; Zhang, Tianyi et al.
2016 IEEE SENSORS Proceedings . IEEE, 2016. 7808792 (Proceedings of IEEE Sensors).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range

AU - Wang, Shudong

AU - Ren, Juan

AU - Zhang, Tianyi

AU - Weng, Yinsheng

AU - Jiang, Zhuangde

AU - Wei, Xueyong

PY - 2016/10

Y1 - 2016/10

N2 - In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation, and then fabricated through a commercial silicon-on-insulator (SOI)-MEMS foundry process. The measured sensitivity can reach at least 858.6Hz/90° in the full range from 0° to 360°, which verifies the design concept. Based on this preliminary work, the sensitivity of re-designed tilt sensor is expected to reach 1700Hz/90° after an optimization.

AB - In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation, and then fabricated through a commercial silicon-on-insulator (SOI)-MEMS foundry process. The measured sensitivity can reach at least 858.6Hz/90° in the full range from 0° to 360°, which verifies the design concept. Based on this preliminary work, the sensitivity of re-designed tilt sensor is expected to reach 1700Hz/90° after an optimization.

KW - DETF

KW - MEMS resonant

KW - tilt sensor

UR - https://www.scopus.com/pages/publications/85010951246

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85010951246&origin=recordpage

U2 - 10.1109/ICSENS.2016.7808792

DO - 10.1109/ICSENS.2016.7808792

M3 - RGC 32 - Refereed conference paper (with host publication)

AN - SCOPUS:85010951246

T3 - Proceedings of IEEE Sensors

BT - 2016 IEEE SENSORS Proceedings

PB - IEEE

T2 - 15th IEEE Sensors Conference, SENSORS 2016

Y2 - 30 October 2016 through 2 November 2016

ER -

A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360° Measurement Range

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