A MEMS resonant accelerometer for low-frequency vibration detection

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

11 Scopus Citations
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Detail(s)

Original languageEnglish
Pages (from-to)151-158
Journal / PublicationSensors and Actuators, A: Physical
Volume283
Online published28 Sep 2018
Publication statusPublished - 1 Nov 2018

Abstract

According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications.

Research Area(s)

  • Dynamic test, Low-frequency, MEMS resonant accelerometer, Oscillator

Bibliographic Note

Full text of this publication does not contain sufficient affiliation information. With consent from the author(s) concerned, the Research Unit(s) information for this record is based on the existing academic department affiliation of the author(s).