A MEMS high-speed angular-position sensing system with RF wireless transmission

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Original languageEnglish
Pages (from-to)244-251
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
Externally publishedYes


TitleSmart Structures and Materials 2001- Smart Electronics and MEMS
PlaceUnited States
CityNewport Beach, CA
Period5 - 7 March 2001


A novel surface-micromachined non-contact high-speed angular-position sensor with total surface area under 4mm2 was developed using the Multi-User MEMS Processes (MUMPs) and integrated with a commercial RF transmitter at 433MHz carrier frequency for wireless signal detection. Currently, a 2.3 MHz internal clock of our data acquisition system and a sensor design with a 13μg seismic mass is sufficient to provide visual observation of a clear sinusoidal response wirelessly generated by the piezoresistive angular-position sensing system within speed range of 180 rpm to around 1000 rpm. Experimental results showed that the oscillation frequency and amplitude are related to the input angular frequency of the rotation disk and the tilt angle of the rotation axis, respectively. These important results could provide groundwork for MEMS researchers to estimate how gravity influences structural properties of MEMS devices under different circumstances.

Research Area(s)

  • High-speed rotation sensing, Micro rotation sensor, Non-contact rotation sensing, Wireless micro sensor