A MEMS accelerometer based on synchronizing DETF oscillators

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)

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Author(s)

  • Dong Pu
  • Ronghua Huan
  • Zhuangde Jiang
  • Xueyong Wei

Related Research Unit(s)

Detail(s)

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages660-663
ISBN (Print)9781728116105
Publication statusPublished - Jan 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Title32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019)
PlaceKorea, Republic of
CitySeoul
Period27 - 31 January 2019

Abstract

In this abstract, a novel MEMS resonant accelerometer based on synchronized double-ended tuning fork (DETF) oscillators is reported. Synchronization is recently proved to enhance the stability of coupled MEMS oscillators. In this report, synchronization was utilized to improve the performance of the resonant accelerometer. In the experimental evaluation, scale factor of the sensor proposed was 1056Hz/g. Through synchronization, the zero-bias instability of the oscillator was improved to 98ppb in an integration time of 1s, which is 2 times better than before. This design demonstrates the feasibility of resonant sensors based on synchronizing DETF oscillators and provides a new method in improving their performance.

Citation Format(s)

A MEMS accelerometer based on synchronizing DETF oscillators. / Wang, Shudong; Pu, Dong; Huan, Ronghua; Jiang, Zhuangde; Shen, Yajing; Wei, Xueyong .

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). Institute of Electrical and Electronics Engineers Inc., 2019. p. 660-663 8870824 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)