A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

1 Scopus Citations
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Author(s)

  • Shyam Bharatkumar Patel
  • Nik Radevski
  • Nicholas Mondinos
  • Xiaoli Zhao
  • Kevin Jack
  • And 3 others
  • Jean-Pierre Veder
  • Zhi-feng Zhou
  • Zhong-Tao Jiang

Detail(s)

Original languageEnglish
Pages (from-to)6875-6884
Journal / PublicationCeramics International
Volume45
Issue number6
Online published25 Dec 2018
Publication statusPublished - 15 Apr 2019

Abstract

Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical properties of magnetron sputtered Ce/Ti oxide thin films on Si (100) wafers with different Ce:Ti ratios are investigated experimentally and by modelling. X-ray Photoemission Spectroscopy (XPS) and X-ray diffraction (XRD) confirm the primary phases as trigonal Ce2O3 and rutile form of TiO2 with SiO2 present in all prepared materials. FESEM imaging delivers information based on the variation of grain size, the mixed Ce/Ti oxides providing much smaller grain sizes in the thin film/substrate composite. Nanoindentation analysis concludes that the pure cerium oxide film has the highest hardness value (20.1 GPa), while the addition of excess titanium oxide decreases the hardness of the film coatings. High temperature in-situ XRD (up to 1000 °C) results indicate high thermal phase stability for all materials studied. The film with Ce:Ti = 68%:32% has a new additional minor oxide phase above 800 °C. Contact angle experiments suggest that the chemical composition of the surface is insignificant affecting the water contact angle. Results show a narrow band of 87.7–95.7° contact angle. The finite element modelling (FEM) modelling of Ce/Ti thin film coatings based on Si(100); Si(110); silica and steel substrates shows a variation in stress concentration.

Research Area(s)

  • Cerium titanium oxides, Finite element modelling, in-situ X-ray diffraction, Mechanical properties, Nanoindentation

Citation Format(s)

A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100). / Patel, Shyam Bharatkumar; Radevski, Nik; Mondinos, Nicholas; Zhao, Xiaoli; Jack, Kevin; Veder, Jean-Pierre; Zhou, Zhi-feng; Jiang, Zhong-Tao.

In: Ceramics International, Vol. 45, No. 6, 15.04.2019, p. 6875-6884.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review