TY - JOUR
T1 - A low temperature bonding of quartz microfluidic chip for serum lipoproteins analysis
AU - Zhuang, Guisheng
AU - Jin, Qinghui
AU - Liu, Jing
AU - Cong, Hui
AU - Liu, Kangdong
AU - Zhao, Jianlong
AU - Yang, Mengsu
AU - Wang, Huimin
PY - 2006/9
Y1 - 2006/9
N2 - A low-temperature bonding method for microfabrication of quartz microfluidic chips has been developed. The bonding process involved two steps: pre-bonding and post-annealing at low temperature. The bonding quality was evaluated by measuring the shear force at bonding interface and the electrical properties of the chips. Shear force of 5.66 MPa (566 N/cm2) was obtained in a bonded chip after a post-annealing at 200°C for 6 h. We owe the strong bonding strength to the formation of Si - O - Si bonds at the bonding interface during the post-annealing stage. The bonding procedures were not sensitive to surrounding and could be performed in a routine laboratory without clean room conditions. The performance of the fabricated microfluidic chips was tested by capillary zone electrophoresis (CZE) of serum lipoproteins with laser-induced fluorescence (LIF). The low-density (LDL) and high-density (HDL) lipoproteins in the serum was separated completely by using tricine buffer with methylglucamine. © Springer Science + Business Media, LLC 2006.
AB - A low-temperature bonding method for microfabrication of quartz microfluidic chips has been developed. The bonding process involved two steps: pre-bonding and post-annealing at low temperature. The bonding quality was evaluated by measuring the shear force at bonding interface and the electrical properties of the chips. Shear force of 5.66 MPa (566 N/cm2) was obtained in a bonded chip after a post-annealing at 200°C for 6 h. We owe the strong bonding strength to the formation of Si - O - Si bonds at the bonding interface during the post-annealing stage. The bonding procedures were not sensitive to surrounding and could be performed in a routine laboratory without clean room conditions. The performance of the fabricated microfluidic chips was tested by capillary zone electrophoresis (CZE) of serum lipoproteins with laser-induced fluorescence (LIF). The low-density (LDL) and high-density (HDL) lipoproteins in the serum was separated completely by using tricine buffer with methylglucamine. © Springer Science + Business Media, LLC 2006.
KW - Glass and/or quartz
KW - Low temperature bonding
KW - Microfluidic chip
KW - Serum lipoprotein
UR - http://www.scopus.com/inward/record.url?scp=33747077442&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33747077442&origin=recordpage
U2 - 10.1007/s10544-006-9142-z
DO - 10.1007/s10544-006-9142-z
M3 - RGC 21 - Publication in refereed journal
C2 - 16799750
SN - 1387-2176
VL - 8
SP - 255
EP - 261
JO - Biomedical Microdevices
JF - Biomedical Microdevices
IS - 3
ER -
