A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

Sagnik Ghosh; Joshua E.-Y. Lee

doi:10.1109/TRANSDUCERS.2017.7994177

A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

Sagnik Ghosh^*
, Joshua E.-Y. Lee

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 0.22 V/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	IEEE
Pages	830-833
ISBN (Electronic)	978-1-5386-2732-7
ISBN (Print)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994177
Publication status	Published - Jun 2017
Event	2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017) - Kaohsiung Exhibition Center, Kaohsiung, Taiwan, China Duration: 18 Jun 2017 → 22 Jun 2017 https://ieeexplore.ieee.org/xpl/conhome/7986674/proceeding

Conference

Conference	2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017)
Abbreviated title	TRANSDUCERS 2017
Place	Taiwan, China
City	Kaohsiung
Period	18/06/17 → 22/06/17
Internet address	https://ieeexplore.ieee.org/xpl/conhome/7986674/proceeding

Research Keywords

Lorentz force
MEMS magnetometer
radial contour mode
thin-film piezoelectric on silicon (TPoS)

Access Output

10.1109/TRANSDUCERS.2017.7994177

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@inproceedings{eaf5326f70fe4368ba300b5d770c4e0f,

title = "A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk",

abstract = "We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 0.22 V/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.",

keywords = "Lorentz force, MEMS magnetometer, radial contour mode, thin-film piezoelectric on silicon (TPoS)",

author = "Sagnik Ghosh and Lee, \{Joshua E.-Y.\}",

year = "2017",

month = jun,

doi = "10.1109/TRANSDUCERS.2017.7994177",

language = "English",

isbn = "9781538627310",

pages = "830--833",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

publisher = "IEEE",

address = "United States",

note = "2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

url = "https://ieeexplore.ieee.org/xpl/conhome/7986674/proceeding",

}

Ghosh, S & Lee, JE-Y 2017, A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994177, IEEE, pp. 830-833, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Kaohsiung, Taiwan, China, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994177

A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk. / Ghosh, Sagnik ; Lee, Joshua E.-Y.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2017. p. 830-833 7994177.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

AU - Ghosh, Sagnik

AU - Lee, Joshua E.-Y.

PY - 2017/6

Y1 - 2017/6

N2 - We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 0.22 V/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.

AB - We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 0.22 V/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.

KW - Lorentz force

KW - MEMS magnetometer

KW - radial contour mode

KW - thin-film piezoelectric on silicon (TPoS)

UR - https://www.scopus.com/pages/publications/85029356340

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85029356340&origin=recordpage

U2 - 10.1109/TRANSDUCERS.2017.7994177

DO - 10.1109/TRANSDUCERS.2017.7994177

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781538627310

SP - 830

EP - 833

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - IEEE

T2 - 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017)

Y2 - 18 June 2017 through 22 June 2017

ER -

A Lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

Abstract

Conference

Research Keywords

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this