A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

12 Scopus Citations
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Author(s)

  • Masahiro Nakajima
  • Fumihito Arai
  • Lixin Dong
  • Toshio Fukuda

Detail(s)

Original languageEnglish
Title of host publication4th IEEE Conference on Nanotechnology 2004
PublisherInstitute of Electrical and Electronics Engineers, Inc.
Pages462-464
ISBN (print)0780385365
Publication statusPublished - Aug 2004
Externally publishedYes

Conference

Title2004 4th IEEE Conference on Nanotechnology
PlaceGermany
CityMunich
Period16 - 19 August 2004

Abstract

A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric devices for driving in 3 translational degrees of freedoms (DOFs) and a passive 3-DOF sample stage driven by SEM nanorobotic manipulators. The nanomanipulation system has high enough resolution to identify nano-scale objects, e.g. carbon nanotube (CNT), due to the adoption of a TEM, and efficient and rapid nanomanipulations have been realized within wide enough working space of the SEM nanomanipulators. © 2004 IEEE.

Research Area(s)

  • Carbon Nanotubes, Nanomanipulation, Scanning Electron Microscope, Transmission Electron Microscope

Citation Format(s)

A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes. / Nakajima, Masahiro; Arai, Fumihito; Dong, Lixin et al.
4th IEEE Conference on Nanotechnology 2004 . Institute of Electrical and Electronics Engineers, Inc., 2004. p. 462-464.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review