A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Detail(s)
Original language | English |
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Title of host publication | 4th IEEE Conference on Nanotechnology 2004 |
Publisher | Institute of Electrical and Electronics Engineers, Inc. |
Pages | 462-464 |
ISBN (print) | 0780385365 |
Publication status | Published - Aug 2004 |
Externally published | Yes |
Conference
Title | 2004 4th IEEE Conference on Nanotechnology |
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Place | Germany |
City | Munich |
Period | 16 - 19 August 2004 |
Link(s)
Abstract
A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric devices for driving in 3 translational degrees of freedoms (DOFs) and a passive 3-DOF sample stage driven by SEM nanorobotic manipulators. The nanomanipulation system has high enough resolution to identify nano-scale objects, e.g. carbon nanotube (CNT), due to the adoption of a TEM, and efficient and rapid nanomanipulations have been realized within wide enough working space of the SEM nanomanipulators. © 2004 IEEE.
Research Area(s)
- Carbon Nanotubes, Nanomanipulation, Scanning Electron Microscope, Transmission Electron Microscope
Citation Format(s)
A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes. / Nakajima, Masahiro; Arai, Fumihito; Dong, Lixin et al.
4th IEEE Conference on Nanotechnology 2004 . Institute of Electrical and Electronics Engineers, Inc., 2004. p. 462-464.
4th IEEE Conference on Nanotechnology 2004 . Institute of Electrical and Electronics Engineers, Inc., 2004. p. 462-464.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review