Abstract
A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric devices for driving in 3 translational degrees of freedoms (DOFs) and a passive 3-DOF sample stage driven by SEM nanorobotic manipulators. The nanomanipulation system has high enough resolution to identify nano-scale objects, e.g. carbon nanotube (CNT), due to the adoption of a TEM, and efficient and rapid nanomanipulations have been realized within wide enough working space of the SEM nanomanipulators. © 2004 IEEE.
| Original language | English |
|---|---|
| Title of host publication | 4th IEEE Conference on Nanotechnology 2004 |
| Publisher | IEEE |
| Pages | 462-464 |
| ISBN (Print) | 0780385365 |
| DOIs | |
| Publication status | Published - Aug 2004 |
| Externally published | Yes |
| Event | 4th IEEE Conference on Nanotechnology IEEE-NANO 2004) - Munich, Germany Duration: 16 Aug 2004 → 19 Aug 2004 |
Conference
| Conference | 4th IEEE Conference on Nanotechnology IEEE-NANO 2004) |
|---|---|
| Place | Germany |
| City | Munich |
| Period | 16/08/04 → 19/08/04 |
Research Keywords
- Carbon Nanotubes
- Nanomanipulation
- Scanning Electron Microscope
- Transmission Electron Microscope
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