A Hybrid Nanorobotic Manipulation System Integrated with Nanorobotic Manipulators inside Scanning and Transmission Electron Microscopes

Masahiro Nakajima, Fumihito Arai, Lixin Dong, Toshio Fukuda

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric devices for driving in 3 translational degrees of freedoms (DOFs) and a passive 3-DOF sample stage driven by SEM nanorobotic manipulators. The nanomanipulation system has high enough resolution to identify nano-scale objects, e.g. carbon nanotube (CNT), due to the adoption of a TEM, and efficient and rapid nanomanipulations have been realized within wide enough working space of the SEM nanomanipulators. © 2004 IEEE.
Original languageEnglish
Title of host publication4th IEEE Conference on Nanotechnology 2004
PublisherIEEE
Pages462-464
ISBN (Print)0780385365
DOIs
Publication statusPublished - Aug 2004
Externally publishedYes
Event4th IEEE Conference on Nanotechnology IEEE-NANO 2004) - Munich, Germany
Duration: 16 Aug 200419 Aug 2004

Conference

Conference4th IEEE Conference on Nanotechnology IEEE-NANO 2004)
PlaceGermany
CityMunich
Period16/08/0419/08/04

Research Keywords

  • Carbon Nanotubes
  • Nanomanipulation
  • Scanning Electron Microscope
  • Transmission Electron Microscope

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