A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors

Ju-Nan Kuo; Gwo-Bin Lee; Wen-Fung Pan

doi:10.1109/LPT.2004.831544

A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors

Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

14 Citations (Scopus)

Abstract

A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved. © 2004 IEEE.

Original language	English
Pages (from-to)	2042-2044
Journal	IEEE Photonics Technology Letters
Volume	16
Issue number	9
DOIs	https://doi.org/10.1109/LPT.2004.831544
Publication status	Published - Sept 2004
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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abstract = "A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved. {\textcopyright} 2004 IEEE.",

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AU - Lee, Gwo-Bin

AU - Pan, Wen-Fung

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N2 - A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved. © 2004 IEEE.

AB - A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved. © 2004 IEEE.

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JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

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ER -

A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors

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