A hierarchical intelligent methodology for spatiotemporal control of wafer temperature in rapid thermal processing

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Mathematics

100
Control Mathematics
50
Subsystems Mathematics
33
Dynamical System Mathematics
16
Interaction Mathematics
16
Nonlinear Mathematics

Keyphrases

100
Wafer Temperature Keyphrases
100
Intelligent Methods Keyphrases
100
Rapid Thermal Proce... Keyphrases
100
Spatiotemporal Cont... Keyphrases
80
Temperature Uniform... Keyphrases
40
Fuzzy Logic Control... Keyphrases
40
Spatiotemporal Dyna... Keyphrases
40
Controlled Source Keyphrases
40
Spatially Distribut... Keyphrases
20
Control Scheme Keyphrases
20
Depositional System Keyphrases
20
Nonlinear Dynamics Keyphrases
20
Semiconductor Manuf... Keyphrases
20
Highly Nonlinear Keyphrases
20
Upper Level Keyphrases
20
Coordination Strate... Keyphrases
20
Uniform Control Keyphrases
20
Decomposition Strat... Keyphrases
20
Rapid Thermal Chemi... Keyphrases
20
Local Coordination Keyphrases
20
Multiple Control Keyphrases

INIS

100
control INIS
100
processing INIS
66
levels INIS
33
dynamics INIS
33
fuzzy logic INIS
33
dynamical systems INIS
16
interactions INIS
16
semiconductor mater... INIS
16
decomposition INIS
16
manufacturing INIS
16
chemical vapor depo... INIS
16
nonlinear problems INIS

Engineering

100
Rapid Thermal Proce... Engineering
100
Temperature Engineering
60
Subsystems Engineering
40
Fuzzy Logic Control... Engineering
20
Chemical Vapor Depo... Engineering
20
Vapor Deposition Engineering
20
Deposition System Engineering
20
Control Scheme Engineering
20
Low Level Engineering
20
Semiconductor Manuf... Engineering

Chemical Engineering

100
Temperature Chemical Engineering
20
Vapor Deposition Chemical Engineering
20
Chemical Vapor Depo... Chemical Engineering
Research OutputsResearch Output authored by A hierarchical intelligent methodology for spatiotemporal control of wafer temperature in rapid thermal processing is tagged with the concept