3-D ATOMISTIC KINETIC MONTE CARLO SIMULATIONS OF POINT DEFECT INCORPORATION DURING CVD DIAMOND FILM GROWTH

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Diamond Films Material Science
100
Temperature Material Science
100
Chemical Vapor Depo... Material Science
100
Point Defect Material Science
100
Growth Rate Material Science
100
Film Growth Material Science
100
Surface (Surface Sc... Material Science
66
Diamond Material Science
33
Film Material Science
33
Protective Atmosphe... Material Science

Keyphrases

100
Growth Rate Keyphrases
100
Acetylene Keyphrases
100
Film Growth Keyphrases
100
CVD Diamond Film Keyphrases
100
Kinetic Monte Carlo Keyphrases
100
Atomistic Kinetic M... Keyphrases
66
Substrate Temperatu... Keyphrases
66
Point Defect Concen... Keyphrases
33
Diamond Keyphrases
33
Diamond Film Keyphrases
33
Atomic Layers Keyphrases
33
Film Orientation Keyphrases
33
Defect Concentratio... Keyphrases
33
(100) Surfaces Keyphrases
33
Temporal Evolution Keyphrases
33
H Atoms Keyphrases
33
(111)-oriented Keyphrases
33
Diamond Cubic Keyphrases
33
H-surfaces Keyphrases
33
Cubic Lattice Keyphrases
33
K-points Keyphrases
33
Growth Efficiency Keyphrases
33
CVD Growth Keyphrases

INIS

100
films INIS
100
growth INIS
100
chemical vapor depo... INIS
100
kinetics INIS
100
point defects INIS
100
simulation INIS
100
monte carlo method INIS
100
diamonds INIS
40
surfaces INIS
40
atoms INIS
30
concentration INIS
20
substrates INIS
10
orientation INIS
10
defects INIS
10
atmospheres INIS
10
bonding INIS
10
layers INIS
10
vacancies INIS
10
dimensions INIS
10
efficiency INIS
10
dimers INIS
10
cubic lattices INIS

Engineering

100
Chemical Vapor Depo... Engineering
100
Diamond Engineering
75
Growth Rate Engineering
50
Surface Engineering
50
Substrate Temperatu... Engineering
25
Plane Surface Engineering
25
Atomic Layer Engineering
25
Temporal Evolution Engineering
25
Growing Film Engineering
25
Film Orientation Engineering
25
Temperature Engineering
25
Efficiency Engineering
Research OutputsResearch Output authored by 3-D ATOMISTIC KINETIC MONTE CARLO SIMULATIONS OF POINT DEFECT INCORPORATION DURING CVD DIAMOND FILM GROWTH is tagged with the concept