2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator

Haoshen ZHU; XIAO Di; En-yuan Joshua LEE

2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator

Haoshen ZHU, XIAO Di, En-yuan Joshua LEE

Department of Electrical Engineering

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 22 Sept 2014
Event	40th Int. Conf. on Micro and Nano Engineering (MNE 2014) - , Switzerland Duration: 22 Sept 2014 → 26 Sept 2014

Conference

Conference	40th Int. Conf. on Micro and Nano Engineering (MNE 2014)
Place	Switzerland
Period	22/09/14 → 26/09/14

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@conference{d6fd97ba0c484360a2184b4bcaf355c5,

title = "2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator",

author = "Haoshen ZHU and XIAO Di and LEE, {En-yuan Joshua}",

year = "2014",

month = sep,

day = "22",

language = "English",

note = "40th Int. Conf. on Micro and Nano Engineering (MNE 2014) ; Conference date: 22-09-2014 Through 26-09-2014",

}

2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator. / ZHU, Haoshen; Di, XIAO; LEE, En-yuan Joshua.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - 2D phononic crystal acoustic bandgap for anchor loss reduction in a contour mode 142MHz piezoelectric AlN-on-silicon micromechanical resonator

AU - ZHU, Haoshen

AU - Di, XIAO

AU - LEE, En-yuan Joshua

PY - 2014/9/22

Y1 - 2014/9/22

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 40th Int. Conf. on Micro and Nano Engineering (MNE 2014)

Y2 - 22 September 2014 through 26 September 2014

ER -