135-ghz micromachined on-chip antenna and antenna array

Hui Chu; Yong-Xin Guo; Teck-Guan Lim; Yee Mong Khoo; Xiangquan Shi

doi:10.1109/TAP.2012.2209855

135-ghz micromachined on-chip antenna and antenna array

Hui Chu, Yong-Xin Guo, Teck-Guan Lim, Yee Mong Khoo, Xiangquan Shi

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

62 Citations (Scopus)

Abstract

This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE.

Original language	English
Article number	6247473
Pages (from-to)	4582-4588
Journal	IEEE Transactions on Antennas and Propagation
Volume	60
Issue number	10
DOIs	https://doi.org/10.1109/TAP.2012.2209855
Publication status	Published - 2012
Externally published	Yes

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

Micromachining
on-chip antennas
silicon antennas
sub-terahertz antennas

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title = "135-ghz micromachined on-chip antenna and antenna array",

abstract = "This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. {\textcopyright} 2012 IEEE.",

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TY - JOUR

T1 - 135-ghz micromachined on-chip antenna and antenna array

AU - Chu, Hui

AU - Guo, Yong-Xin

AU - Lim, Teck-Guan

AU - Khoo, Yee Mong

AU - Shi, Xiangquan

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2012

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N2 - This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE.

AB - This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE.

KW - Micromachining

KW - on-chip antennas

KW - silicon antennas

KW - sub-terahertz antennas

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135-ghz micromachined on-chip antenna and antenna array

Abstract

Bibliographical note

UN SDGs

Research Keywords

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