1 THz Micromachined Waveguide Band-Pass Filter

This paper presents a waveguide band-pass filter operating at the 0.75∼1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE₃₀₁/TE₁₀₂ dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.