香港城市大学等离子体实验室的等离子体浸没式离子注入研究简介

曾旭初; Paul Kim Ho 朱剑豪

香港城市大学等离子体实验室的等离子体浸没式离子注入研究简介

Translated title of the contribution: Plasma Immersion Ion Implantation Research Activities in the Plasma Laboratory of the City University of Hong Kong

曾旭初
, 朱剑豪

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Translated title of the contribution	Plasma Immersion Ion Implantation Research Activities in the Plasma Laboratory of the City University of Hong Kong
Original language	Chinese (Simplified)
Publication status	Published - Oct 2001
Event	第十届全国等离子体科学技术会议 - Wuhan, China Duration: 1 Oct 2001 → … https://www.cstam.org.cn/getAcaEventById.htm?channelId=113&id=61&year=2001

Conference

Conference	第十届全国等离子体科学技术会议
Place	China
City	Wuhan
Period	1/10/01 → …
Internet address	https://www.cstam.org.cn/getAcaEventById.htm?channelId=113&id=61&year=2001

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Information for this record is supplemented by the author(s) concerned.

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@conference{62977d43ee0743898e5fc307184fec10,

title = "香港城市大学等离子体实验室的等离子体浸没式离子注入研究简介",

author = "曾旭初 and 朱剑豪",

note = "Information for this record is supplemented by the author(s) concerned.; 第十届全国等离子体科学技术会议 ; Conference date: 01-10-2001",

year = "2001",

month = oct,

language = "繁体中文",

url = "https://www.cstam.org.cn/getAcaEventById.htm?channelId=113\&id=61\&year=2001",

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TY - CONF

T1 - 香港城市大学等离子体实验室的等离子体浸没式离子注入研究简介

AU - 曾旭初, null

AU - 朱剑豪, null

N1 - Information for this record is supplemented by the author(s) concerned.

PY - 2001/10

Y1 - 2001/10

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 第十届全国等离子体科学技术会议

Y2 - 1 October 2001

ER -