面向微粒操纵的介电泳芯片系统研究

Considering the lack of effective methods to perform the batch manipulation of micro/nano particles during the application of micro/nano sensors, channels, and devices, we present the dielectrophoretic method to localize and transport micro/nano particles using a specially design micro-chip. The fabrication process and design critria of the dielectrophoretic micro-chip is described, The electric field distribution was analyzed by FEM tool in order to obtain and predict the dielectrophoretic force in an actual experiment. Experiments were conducted using the micro-chip to dielectrophoretically manipulate micro-scale particles. The levitation height and movement speed of particles in the chip's micro channel were measured. We have shown that the micro-chip discussed provides an effective way for assembly and separation of micro particles in a fluidic environment.