Abstract
A special curved magnetic filter was developed to investigate the effect of different bias mode on the transport of cathode arc plasma through the curved magnetic filter. The relation between the ion output of the filter and the cathode arc current was determined. Each part of the wall inside the duct interacted with the plasma independently. Two kinds of ion flux onto the duct wall were presented and they played different roles when cathode arc current changed. It was found that whole duct bias was more effective in plasma transport through the filter than the Bilek plate bias, although the Bilek plate (or the outer-wall inside the duct) contributed most part of ion output of curved magnetic filter when they were positively biased.
| Translated title of the contribution | Effect of bias mode on transport of vacuum arc plasma through curved magnetic filters |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 61-64 |
| Journal | 核技术 |
| Volume | 25 |
| Issue number | 1 |
| Publication status | Published - Jan 2002 |
Research Keywords
- 阴极弧离子源
- 磁过滤弯管
- 等离子体传输
- Cathodic arc plasma source
- Magnetic filter
- Plasma transport