Abstract
Au film was fabricated on Al2O3 substrate by magnetron sputtering. The relationship between resistivity of metallic film and its surface roughness, residual stress was investigated according to experimental results. The results show that the resistivity of the metallic film correlates with surface roughness and residual stress. The increase of resistivity with surface roughness and tensile residual stress can be explained by the strain energy theory. It can be inferred that crystal orientation may be connect with the mechanical behavior and functional property of metallic film.
| Translated title of the contribution | Relationship between resistivity of metallic film and its surface roughness, residual stress |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 617-620 |
| Journal | 稀有金属材料与工程 |
| Volume | 37 |
| Issue number | 4 |
| Publication status | Published - Apr 2008 |
| Externally published | Yes |
Research Keywords
- 金属薄膜
- 电阻率
- 表面粗糙度
- 残余应力
- Metallic film
- Resistivity
- Surface roughness
- Residual stress
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