Abstract
In this paper, a hybrid nanorobotic manipulation system is presented. This manipulation system consists of a manipulator being able to work inside a scanning electron microscope (SEM), SEM nanorobotic manipulator, with a small manipulator being able to work inside a transmission electron microscope (TEM), TEM nanorobotic manipulator. The TEM nanorobotic manipulator consists of a 3-degree-of-freedom (DOF) manipulator actuated with 4 piezoelectric stacks and a 3-DOF passively driven translational sample stage. This stage is pre-manipulated with the SEM manipulator for sample preparations inside the SEM. The system enables high resolution manipulation inside the TEM by setting samples inside the SEM. The methodology is named as hybrid nanorobotic manipulation so as to differentiate it from those only with an exchangeable specimen holder. To show the effectiveness of the system, the elastic modulus of a carbon nanotube (CNT) was measured to be 1.23 TPa inside the TEM after being pre-manipulated inside the SEM. With this system, we can measure the inner diameter of a CNT and improve the accuracy in measuring the elastic modulus of a CNT.
| Translated title of the contribution | Measurement of a bending modulus of a nanotube through hybrid nanorobotic manipulation system inside SEM and TEM |
|---|---|
| Original language | Japanese |
| Pages (from-to) | 1349-1354 |
| Journal | 日本機械学会論文集 C編 |
| Volume | 71 |
| Issue number | 704 |
| DOIs | |
| Publication status | Published - 25 Apr 2005 |
| Externally published | Yes |
Research Keywords
- Carbon Nanotubes
- Nanorobotic Manipulation
- Scanning Electron Microscope
- Transmission Electron Microscope