Abstract
A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05 μm to 1.6 μm or from 0.4 μm to 12.5 μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to these measured by Telyer-soft.
| Translated title of the contribution | Real time measurement of surface roughness using laser technique |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 6-10 |
| Journal | 清华大学学报 (自然科学版)/Journal of Tsinghua University (Science and Technology) |
| Volume | 39 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Feb 1999 |
Research Keywords
- 表面粗糙度
- 散斑
- 暗区比
- surface roughness
- speckles
- dark region ratio
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