Abstract
The nanoscrach properties of diamond-like carbon (DLC) films prepared on Ti alloy substrate with rf PECVD were evaluated using a Nano Indenter XP system with the attachments of lateral force measurement (LFM) and their elastic-plastic deformation and mechanism of cracks formation were also analysed during scratching. It was concluded that three processes containing deformation of films, together deforming of films and substrate, and pulling-off of films successively occur with the increase of load during scratching, corresponding to nearly overlaping, separating and abruptly changing of the P-D curves. During the third regime, plastic deformation exceeded elastic part films were dominated from the substrate, which may be attributed to combining effect of cracks in the film and the entire pulling-off between the film and the substrate due to asynchronous recovery of the films and the substrate. Therefore, it is important to enhance bond strength and fracture toughness of films.
| Translated title of the contribution | ELASTIC-PLASTIC DEFORMATION AND FRACTURE MECHANISM ANALYSIS OF DIAMOND-LIKE CARBON FILMS DURING NANOSCRATCHING |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 733-736 |
| Journal | Jinshu Xuebao/Acta Metallurgica Sinica |
| Volume | 37 |
| Issue number | 7 |
| Publication status | Published - Jul 2001 |
| Externally published | Yes |
Research Keywords
- 类金刚石碳膜
- 纳米划痕
- 断裂机制
- 力学性能
- Diamond-like carbon
- Nanoscratch
- Fracture mechanism
- Mechanical property