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磷掺杂类金刚石薄膜的制备与性能研究

Translated title of the contribution: Preparation and properties of phosphorus doped diamond-like carbon films
  • 王进*
  • , Sunny C.H. Kwok
  • , 陈俊英
  • , 杨萍
  • , 黄楠
  • , P.K. Chu
  • *Corresponding author for this work

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Abstract

    The phosphorus-doped diamond-like carbon (P-doped DLC) films are fabricated by plasma immersion ion implantation and deposition (PIII-D). Microstructure manifesting as dots are visible under atomic force micrographs disclose that these round and flat islands are distributed evenly on the film surface. Auger electron spectroscopy (AES) shows that they are composed of C, P and O while only C and O can be found in the areas away from the islands. The P-doped DLC film exhibits excellent wettability (16.9° water contact angle). In vitro platelet adhesion experiment is conducted to examine the blood compatibility. Studies of scanning electron microscopy (SEM) and optical microscopy reveal a significant decrease of the number as well as activation of platelets on the P-doped DLC film, compared to the undoped DLC film and low temperature isotropic carbon (LTIC).
    Translated title of the contributionPreparation and properties of phosphorus doped diamond-like carbon films
    Original languageChinese (Simplified)
    Pages (from-to)123-126
    Journal真空科学与技术学报
    Volume25
    Issue number2
    DOIs
    Publication statusPublished - Mar 2005

    Research Keywords

    • 类金刚石
    • 磷掺杂
    • 血液相容性
    • 等离子体浸没离子注入与沉积
    • Diamond-like carbon (DLC)
    • Phosphorus doped (P-doped)
    • Blood compatibility
    • Plasma immersion ion implantation-D (PIII-D)

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