Abstract
Potential contour map of cluster Si66H50-H2O simulating H2O adsorbed on Si(100) has been calculated by using semiempirical CNDO method. The results suggest that the best adsorption site is cave position, and the adsorption probability of bridge I position, bridge II position and top position reduces in turn.
| Translated title of the contribution | Determination of adsorption site of H2O on Si(100) surface |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 820-825 |
| Journal | 半导体学报 |
| Volume | 16 |
| Issue number | 11 |
| Publication status | Published - Nov 1995 |
| Externally published | Yes |