改良型 Ge 浓缩技术制备 SGOI 及其原理

Translated title of the contribution: Improved Germanium Condensation Technique for Fabrication of SGOI and Mechanism

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Translated title of the contribution	Improved Germanium Condensation Technique for Fabrication of SGOI and Mechanism
Original language	Chinese (Simplified)
Title of host publication	第六届全国SOI技术研讨会论文集
Pages	52-56
Publication status	Published - May 2005

Research Keywords

@inproceedings{accd2c4460044e5baa68d5187b9bdcdd,

title = "改良型 Ge 浓缩技术制备 SGOI 及其原理",

keywords = "SiGe, 氧化, 擴散, SiGe, 氧化, 扩散",

author = "狄增峰 and 张苗 and 刘卫丽 and 张正选 and 骆苏华 and 宋志棠 and 朱剑豪 and 林成鲁",

year = "2005",

month = may,

language = "繁体中文",

pages = "52--56",

booktitle = "第六届全国SOI技术研讨会论文集",

}

TY - GEN

T1 - 改良型 Ge 浓缩技术制备 SGOI 及其原理

AU - 狄增峰, null

AU - 张苗, null

AU - 刘卫丽, null

AU - 张正选, null

AU - 骆苏华, null

AU - 宋志棠, null

AU - 朱剑豪, null

AU - 林成鲁, null

PY - 2005/5

Y1 - 2005/5

KW - SiGe

KW - 氧化

KW - 擴散

KW - SiGe

KW - 氧化

KW - 扩散

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 52

EP - 56

BT - 第六届全国SOI技术研讨会论文集

ER -