Abstract
To solve the control problem of spatially-distributed systems with multiple actuators, a fuzzy control strategy with spatial decomposition and local coordination is proposed based on the existing literature. A spatial fuzzy controller is presented for multiple actuators, and then spatial fuzzy controllers with coordination function are designed. A rapid thermal chemical vapor deposition (RTCVD) system is taken as an example. The simulation results show that the proposed control method can achieve an excellent spatial uniformity.
| Translated title of the contribution | Novel fuzzy control for spatially-distributed systems based on decomposition and coordination strategy |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 709-713 |
| Journal | 控制与决策/Control and Decision |
| Volume | 23 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Jun 2008 |
Research Keywords
- 三维模糊集
- 模糊控制
- 空间分布系统
- Spatial fuzzy set
- Fuzzy control
- Spatially-distributed system
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