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不同靶材料的高功率脉冲磁控溅射放电行为

Translated title of the contribution: High power pulsed magnetron sputtering discharge behavior of various target materials
  • 吴忠振*
  • , 田修波
  • , 潘锋
  • , 付劲裕
  • , 朱剑豪
    • *Corresponding author for this work

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    9   Link opens in a new tab Citations (Scopus)

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