| Translated title of the contribution | Synthesizer of Controllable Carbonitride Film of Preparation Thickness |
|---|---|
| Original language | Chinese (Traditional) |
| Patent number | ZL201821526519.3 |
| Publication status | Published - 30 Apr 2019 |
一種製備厚度可控氮化碳薄膜的合成裝置
Ruiqin ZHANG (Inventor), Wei XIONG (Inventor)
Research output: Patents, Agreements and Assignments › RGC 51 - Patents (CityUHK)