一種製備厚度可控氮化碳薄膜的合成裝置

Translated title of the contribution: Synthesizer of Controllable Carbonitride Film of Preparation Thickness

Ruiqin ZHANG (Inventor), Wei XIONG (Inventor)

Research output: Patents, Agreements and AssignmentsRGC 51 - Patents (CityUHK)

Translated title of the contributionSynthesizer of Controllable Carbonitride Film of Preparation Thickness
Original languageChinese (Traditional)
Patent numberZL201821526519.3
Publication statusPublished - 30 Apr 2019

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