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VHF Piezoelectric Aluminum Nitride on Silicon Lamb Wave Mode Micromechanical Lorentz Force Magnetometers
LEE, En-yuan Joshua
(Principal Investigator / Project Coordinator)
Department of Electrical Engineering
Project
:
Research
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Research output
(5)
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Engineering
Ambient Condition
9%
Ambient Pressure
19%
Capacitive
9%
External Magnetic Field
7%
Inertial Sensor
6%
Lamb Wave
28%
Lorentz Force
100%
Magnetic Field
30%
Microelectromechanical System
57%
Mobile Phones
6%
Nitride
33%
Piezoelectric
100%
Q Factor
20%
Resonant Frequency
9%
Resonator
50%
Responsivity
30%
Square Plate
11%
Thin Films
9%
Transducer
12%
Vibration Mode
8%
Material Science
Aluminum Nitride
35%
Electromechanical Coupling
10%
Magnetometer
100%
Microelectromechanical System
57%
Piezoelectricity
100%
Resonator
50%
Silicon
89%
Thin Films
9%
Transducer
12%