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Plasma Immersion Ion Implantation and Deposition System for Microelectronics, Optoelectronics, and Nanotechnology Research
- CHU, Paul Kim Ho (Principal Investigator / Project Coordinator)
- CHAN, Philip C H (Co-Investigator)
- Cheah, Kok-Wai (Co-Investigator)
- Cheung, Kenneth Man Chee (Co-Investigator)
- HO, Aaron Ho-pui (Co-Investigator)
- LUK, Keith Dip-kei (Co-Investigator)
- Surya, Charles (Co-Investigator)
- Wong, Man (Co-Investigator)
Project: Research