Plasma Immersion Ion Implantation and Deposition System for Microelectronics, Optoelectronics, and Nanotechnology Research

The current plasma immersion ion implantation and deposition (PIII&D) system dedicated to microelectronics, optoelectronics, and nanotechnology research in the Plasma Laboratory of City University of Hong Kong was designed and built by Prof. Paul Chu and his research team in 1998. Being the only facility of this kind in Hong Kong offering plasma surface modification and implantation of semiconductors, microelectronic materials and devices, optoelectronic materials, and nanomaterials, it has emerged to be one of the most productive and versatile plasma research laboratories in the world. Over 400 international and local researchers from about 80 universities, institutions, and companies have used the facilities. The plasma research group, together with their research collaborators, has produced 8 book chapters, more than 300 journal papers and 250 conference papers, as well as 8 US and 5 Chinese patents in these areas since 1998 (Appendix 5). Many research projects have also been funded by agencies and companies in Hong Kong, Australia, Germany, mainland China, and the US to support the diverse research activities. However, due to the heavy use as well as natural wear and tear, the equipment is showing its age. In addition to frequent breakdowns, many components on the instrument are obsolete and the equipment is increasingly unable to meet current research demands. A new and more up-to-date PIII&D machine dedicated to research in microelectronics, optoelectronics, and nanomaterials is needed to replace the 10-year-old instrument. The instrument is proposed to be designed and built based on current technologies and the equipment building experience of the research team. The new machine will incorporate the latest technologies including those patented by Prof. Paul Chu, enabling research staff and local and international research collaborators to continue to perform cutting-edge research in microelectronics, optoelectronics, and nanotechnology for years to come.