Contour Mode Acoustic Resonance in Silicon-on-insulator Mechanical Resonators using Internal Depletion Layer Transducers
Project: Research
Research Output
- 2016
- Published
Effects of cryogenic cooling on the quality factor of lamb wave mode aluminium nitride piezoelectric-on-silicon MEMS resonators
Tu, C. & Lee, J. E. Y., 15 Jun 2016, In: Sensors and Actuators, A: Physical. 244, p. 15-23Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 10 - 2015
- Published
Piezoresistive Readout Mechanically Coupled Lamé Mode SOI Resonator with Q of a Million
Zhu, H., Xu, Y. & Lee, J. E., Aug 2015, In: Journal of Microelectromechanical Systems. 24, 4, p. 771-780 7072458.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 21 - Published
Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance
Zhang, W., Zhu, H. & Lee, J. E., May 2015, In: IEEE Transactions on Electron Devices. 62, 5, p. 1596-1602 7073599.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 13