Contour Mode Acoustic Resonance in Silicon-on-insulator Mechanical Resonators using Internal Depletion Layer Transducers

Project: Research

Research Output

  1. 2016
  2. Published

    Effects of cryogenic cooling on the quality factor of lamb wave mode aluminium nitride piezoelectric-on-silicon MEMS resonators

    Tu, C. & Lee, J. E. Y., 15 Jun 2016, In: Sensors and Actuators, A: Physical. 244, p. 15-23

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 10
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  3. 2015
  4. Published

    Piezoresistive Readout Mechanically Coupled Lamé Mode SOI Resonator with Q of a Million

    Zhu, H., Xu, Y. & Lee, J. E., Aug 2015, In: Journal of Microelectromechanical Systems. 24, 4, p. 771-780 7072458.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 21
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  5. Published

    Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance

    Zhang, W., Zhu, H. & Lee, J. E., May 2015, In: IEEE Transactions on Electron Devices. 62, 5, p. 1596-1602 7073599.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 13
    Check@CityULib