1. Equipment Performance Data Optimization and Its Applications, 2. Mean-time-to-failure equations in reliability and Its Applications - RMGS

To sponsor the next development of Semiconductor Manufacturing industry, this project is emphasizing on 1) understanding and defining equipment performance specification in terms of operation process, hardware, energy consumption, and safety factors; 2) defining an effective strategy in monitoring and controlling process, detection of abnormality via SPC scheme, and defining preventive measures from the data collected during the operation.