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单晶金刚石第四代半导体衬底及其装备研制
戴, 煜
(Main Project Coordinator [External])
LU, Yang
(Principal Investigator / Project Coordinator)
朱, 丹
(Co-Investigator)
王, 艳艳
(Co-Investigator)
Department of Mechanical Engineering
Project
:
Research
Overview
Project Details
Project number
R-IND6506
Grant type
HNGov-SRI
Status
Active
Effective start/end date
31/07/23
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