Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1994
  2. New ways to characterize thin films

    Chu, P. K. & Hockett, R. S., Jun 1994, In: Semiconductor International. 17, 6

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  3. 1993
  4. Quantitative detection of oxygen contamination related traps in gallium arsenide epitaxial layer grown by molecular beam epitaxy at low temperature

    Lau, W. S., Goo, C. H., Chong, T. C. & Chu, P. K., Sep 1993, In: Japanese Journal of Applied Physics. 32, 9, p. L1192-L1195

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  5. MEASUREMENT OF BORON CONTAMINATION IN N+ SILICON SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY

    Chu, P. K., Bleiler, R. J., Metz, J. M., Hitzman, C. J. & Hockett, R. S., May 1993, In: Electrochemical Society Extended Abstracts. 93-1

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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  6. 1992
  7. IMPROVEMENTS IN THE TECHNOS TREX AND NEW TXRF APPLICATIONS

    HOCKETT, R. S. & CHU, P. K., Oct 1992, The Proceedings of the Third International Conference on Solid State and Integrated Circuit Technology. Ellwanger, R., Chuang, C. T., Wang, Y. & Mo, B. (eds.). Publishing House of Electronics Industry, p. 262-264

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  8. 1991
  9. TXRF APPLICATIONS IN THE SEMICONDUCTOR INDUSTRY

    Hockett, R. S. & Chu, P. K., Oct 1991, Proceedings of the International Conference: MATERIALS AND PROCESS CHARACTERIZATION FOR VLSI, 1991 (ICMPC' 91). Zong, X. F., Wang, Y. Y. & Gu, X. Y. (eds.). p. 563-566

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  10. Sub-100 mn p+/n junction formation using plasma immersion ion implantation

    Qian, X. Y., Cheung, N. W., Lieberman, M. A., Current, M. I., Chu, P. K., Harrington, W. L., Magee, C. W. & 1 others, Botnick, E. M., 2 Apr 1991, In: Nuclear Inst. and Methods in Physics Research, B. 55, 1-4, p. 821-825

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 43
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  11. 1990
  12. SURFACE & ANALYTICAL TECHNIQUES

    Chu, P. K., May 1990, p. 90-124.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  13. Growth of in situ doped silicon epitaxial layer by rapid thermal processing

    Lee, S. K., Ku, Y. H., Hsieh, T. Y., Jung, K. H., Kwong, D. L., Spratt, D. & Chu, P., 1990, In: Applied Physics Letters. 57, 16, p. 1628-1630

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 1
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  14. 1989
  15. SIMS AS A BULK ANALYTICAL TOOL

    Chu, P. K., Oct 1989, p. 442-445.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  16. PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS

    Makovsky, J., Goldstein, M. & CHU, P., Sep 1989, Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). Benninghoven, A., Evans, C. A., McKeegan, K. D., Storms, H. A. & Werner, H. W. (eds.). John Wiley & Sons, p. 487-490

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  17. STUDY OF POSSIBLE MATRIX EFFECTS IN THE QUANTITATIVE DETERMINATION OF OXYGEN IN HEAVILY-DOPED CZOCHRALSKI SILICON CRYSTALS

    Bleiler, R. J., Chu, P. K., Novak, S. W. & Wilson, R. G., Sep 1989, Secondary Ion Mass Spectrometry, SIMS VII: Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). Benninghoven, A., Evans, C. A. & McKeegan, K. D. (eds.). John Wiley & Sons, p. 507-510

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  18. Process simulation model for silicon ion implantation in undoped, LEC-grown GaAs

    Bindal, A., Wang, K. L., Chang, S. J., Kallel, M. A. & Chu, P. K., Aug 1989, In: Journal of the Electrochemical Society. 136, 8, p. 2414-2420

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 2
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  19. Put surface analysis to work-in R&D

    Chu, P. K. & Blattner, R. J., Jan 1989, In: Semiconductor International. 12, 1, p. 88-93

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  20. Shallow, silicided p+/n junction formation and dopant diffusion in SiO2/TiSi2/Si structure

    Ku, Y. H., Lee, S. K., Kwong, D. L. & Chu, P., 1989, In: Applied Physics Letters. 54, 17, p. 1684-1686

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 12
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  21. 1988
  22. SELF-ALIGHNED PN JUNCTION AND SILICIDE CONTACT FORMATION BY ION IMPLANT THROUGH TI AND ITS SILICIDE

    Li, B., Zhou, S., Li, J., Hong, F. & Chu, P. K., Oct 1988, Proceedings of the International Conference : Materials and Process Characterization for VLSI, 1988 (ICMPC' 88). Zong, X., Wang, Y. & Chen, J. (eds.). World Scientific , p. 397-400

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  23. Gettering of gold and copper with implanted carbon in silicon

    Wong, H., Cheung, N. W. & Chu, P. K., 1988, In: Applied Physics Letters. 52, 11, p. 889-891

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 78
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  24. Proximity gettering with mega-electron-volt carbon and oxygen implantations

    Wong, H., Cheung, N. W., Chu, P. K., Liu, J. & Mayer, J. W., 1988, In: Applied Physics Letters. 52, 12, p. 1023-1025

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 142
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  25. Quantitative trace element analysis of microdroplet residues by secondary ion mass spectrometry

    Odom, R. W., Lux, G., Fleming, R. H., Chu, P. K., Niemeyer, I. C. & Blattner, R. J., 1988, In: Analytical Chemistry. 60, 19, p. 2070-2075

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 13
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  26. 1987
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  28. SIMS QUANTITATIVE TRACE ELEMENT ANALYSIS OF MICRODROPLETS

    Odom, R. W., Lux, G., Fleming, R. H., Chu, P. K. & Blattner, R. J., Sep 1987, Proceedings of the Sixth International Conference on Secondary Ion Mass Spectrometry (SIMS VI). Benninghoven, A., Huber, A. M. & Werner, H. W. (eds.). John Wiley and Sons, p. 885-887

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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