Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1997
  2. Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon

    Smith, S. P. & Chu, P. K., Sep 1997, p. 203.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  3. Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers

    Chia, V. K. F., Edgell, M. J. & Chu, P. K., Sep 1997, p. 180.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  4. Separation by plasma implantation of oxygen (SPIMOX) operational phase space

    Sundar Kumar, S., Lu, X., Liu, J., Min, J., Fan, Z., Chu, P. K. & Hu, C., 1997, In: IEEE Transactions on Plasma Science. 25, 5, p. 1128-1135

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 17
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  5. 1996
  6. Operational phase-space of separation by plasma implantation of oxygen (SPIMOX)

    Iyer, S. S. K., Lu, X., Liu, J., Linder, B., Hu, C., Cheung, N. W., Min, J. & 2 others, Fan, Z. & Chu, P., 1996, Proceedings of the International Conference on Ion Implantation Technology. IEEE, p. 764-767

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  7. SOI material technology using plasma immersion ion implantation

    Lu, X., Iyer, S. S. K., Min, J., Fan, Z., Liu, J. B., Chu, P. K., Hu, C. & 1 others, Chueng, N. W., 1996, IEEE International SOI Conference. IEEE, p. 48-49

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 5
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  8. 1995
  9. Atomic force microscopy (AFM) statistical process control for microelectronics applications

    Chu, P. K., Brigham, R. G. & Baumann, S. M., Jun 1995, In: Materials Chemistry & Physics. 41, 1, p. 61-65

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  10. High Dose-Rate SIMOX Synthesis by Plasma Implantation

    Liu, J., Iyer, S. S., Hu, C., Cheung, N. W., Min, J. & Chu, P. K., Feb 1995.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  11. Application of imaging TOF-SIMS to the study of some coal macerals

    Hou, X., Ren, D., Mao, H., Lei, J., Jin, K., Chu, P. K., Reich, F. & 1 others, Wayne, D. H., Jan 1995, In: International Journal of Coal Geology. 27, 1, p. 23-32

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 28
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  12. Application of TOF-SIMS to microelectronics

    Chu, P. K., 1995, International Conference on Solid-State and Integrated Circuit Technology Proceedings. IEEE, p. 742-744

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  13. Competitive oxidation during buried oxide formation using separation by plasma implantation of oxygen (SPIMOX)

    Liu, J., Iyer, S. S. K., Min, J., Chu, P., Gronsky, R., Hu, C. & Cheung, N. W., 1995, In: Materials Research Society Symposium - Proceedings. 388, p. 385-391

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  14. Observation of solid phase epitaxial growth of amorphous SiGe on Si(100) substrate

    Qi, W. J., Li, B. Z., Jiang, G. B., Gu, Z. G., Kwok, T. K., Zhang, R. J. & Chu, P. K., 1995, IEEE Region 10 Annual International Conference, Proceedings/TENCON. IEEE, p. 404-407

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  15. Spreading resistance profiling study of GeSi/Si structures by high dose Ge implantation into Si

    Cheung, W. Y., Wong, S. P., Wilson, I. H., Zhang, T. & Chu, P. K., 1995, In: Materials Research Society Symposium - Proceedings. 354, p. 201-206

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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  16. Synthesis of buried oxide by plasma implantation with oxygen and water plasma

    Liu, J. B., Iyer, S. S. K., Min, J., Chu, P. K., Gronsky, R., Hu, C. & Chueng, N. W., 1995, IEEE International SOI Conference. IEEE, p. 166-167

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 7
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  17. 1994
  18. APPLICATIONS OF SIMS TO MICROELECTRONIC THIN FILMS

    Chu, P. K., Dec 1994, p. 59-68.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  19. Determination of sub-parts per billion boron contamination in N+ Czochralski silicon substrates by SIMS

    Chu, P. K., Bleiler, R. J. & Metz, J. M., Dec 1994, In: Journal of the Electrochemical Society. 141, 12, p. 3453-3456

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  20. STATISTICAL PROCESS CONTROL (SPC) FOR AFM MICROROUGHNESS MEASUREMENTS

    Chu, P. K., Brigham, R. G. & Baumann, S. M., Dec 1994, p. 253-258.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  21. SURFACE ANALYSIS OF INORGANIC AND ORGANIC PARTICLES AND CONTAMINANTS ON SILICON WAFERS

    Chu, P. K., Odom, R. W., Chakel, J. A. & Reich, D. F., Dec 1994, p. 259-264.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  22. ANOMALOUS IRON AND CHROMIUM CONTAMINATION FROM BOE

    Chu, P. K., Hockett, R. S. & Metz, J. M., Nov 1994, p. 74-80.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  23. DETECTION OF HIGH OXYGEN AND CARBON CONTENTS IN SEMI-INSULATING GALLIUM ARSENIDE EPITAXIAL LAYERS GROWN BY MOLECULAR BEAM EPITAXY AT LOW TEMPERATURE

    LAU, W. S., CHU, P. K., GOO, C. H. & CHONG, T. C., Nov 1994, p. 179-182.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  24. SIMS and microelectronics

    Chu, P. K., Aug 1994, In: Materials Chemistry and Physics. 38, 3, p. 203-223

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)62_Review of books or of software (or similar publications/items)peer-review

    Scopus citations: 10
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