Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1996
  2. Published

    Improving the impact energy by using auxiliary electrode in a cylindrical bore

    Zeng, X. C., Wang, S. Y., Xing, D. Z., Gao, Y., Liu, A. G., Tang, B. Y. & Chu, P. K., 1996, In: IEEE International Conference on Plasma Science.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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  3. Published

    Post-Implant Anneal: Fundamental Differences in Dopant Diffusion and Activation due to Rapid Thermal Annealing / Furnace Annealing

    Choi, P. S., Su, T., Chang, R. D., Chu, P. K. & Kwong, D. L., 1996, MEETING ABSTRACTS. Vol. 96-1. p. 441-442

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  4. Published

    Profiling Sub-100nm Shallow Junctions by Secondary Ion Mass Spectrometry (SIMS)

    Chu, P. K., Chia, V. K. F., Smith, S. P. & Magee, C. W., 1996, 1996 International Electron Devices and Materials Symposia: Symposium C, E, F. p. 61-64

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  5. Published

    Synthesis of SOI materials using plasma immersion ion implantation

    Chu, P. K., 1996, In: Materials Research Society Symposium - Proceedings. 438, p. 333-343

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 5
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  6. 1995
  7. Published

    LOW-VOLTAGE AND HIGH-SPEED CMOS/SIMOX TECHNOLOGY

    Zhang, X., Wei, L., Xi, X., Wang, Y. & Chu, P. K., Oct 1995, PROCEEDINGS OF THE FOURTH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY. BALDWIN, G. L., LI, Z. & TSAI, C. C. (eds.). IEEE, p. 257-259

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  8. Published

    New development of PIII for SIMOX structure

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. & Cheng, N. W., Aug 1995, In: Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors. 16, 8, p. 636-640

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  9. Published

    Buried oxide formation by plasma immersion ion implantation

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Im, S., Iyer, S. & Cheung, N. W., Apr 1995, In: Materials Chemistry & Physics. 40, 3, p. 219-222

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 25
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  10. Published

    Development of the Industrial Prototype of the Plasma Immersion Ion Implantation

    Tang, B., Wang, S., Yang, S., Chu, P. K., Gau, Y. & Zeng, X., Feb 1995.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  11. Published

    Current Status of SIMS Bulk Analysis in Silicon

    Chu, P. K. & Bleiler, R. J., 1995, Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry (SIMS X). Benninghoven, A., Hagenhoff, B. & Werner, H. (eds.). John Wiley & Sons, p. 549-552

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  12. Published

    Economical fabrication technique for SIMOX using plasma immersion ion implantation

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. S. K. & Cheung, N. W., 1995, International Conference on Solid-State and Integrated Circuit Technology Proceedings. IEEE, p. 253-256

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  13. Published

    Formation of buried oxide in silicon using separation by plasma implantation of oxygen

    Liu, J., Sundar Kumar Iyer, S., Hu, C., Cheung, N. W., Gronsky, R., Min, J. & Chu, P., 1995, In: Applied Physics Letters. 67

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 52
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  14. 1994
  15. Published

    FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)

    LIU, J. B., IYER, S. S. K., MIN, J., CHU, P., GRONSKY, R., HU, C. & CHEUNG, N. W., Dec 1994, In: Materials Research Society Symposium - Proceedings. 354, p. 117-121

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  16. Published

    Metallization of GaN Thin Films Prepared by Ion Beam Assisted Molecular Beam Epitaxy

    Chan, J., Fu, T., Cheung, N., Newman, N., Liu, X., Ross, J., Rubin, M. & 1 others, Chu, P., Dec 1994, In: Materials Research Society Symposium - Proceedings. 339, p. 223-227

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 1
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  17. Published

    Shallow Junction Formation by Epitaxial Cobalt Silicide as Diffusion Source

    Fang, H., Li, B., Shao, K., Gu, Z., Huang, W., Jiang, G., Liu, P. & 2 others, Zhou, Z. & Chu, P. K., Nov 1994, p. 347-350.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  18. Published

    SYNTHESIS AND CHARACTERIZATION OF SIMOX BY PIII

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. & Cheung, N. W., Nov 1994, p. 238-240.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  19. Published

    Rapid Thermal Processing of Shallow Junctions Using Epitaxial CoSi2 as a Doping Source

    Jones, E. C., Ogawa, S., Ameika, P., Dass, M. L. A., Fraser, D. B., Chu, P. & Cheung, N. W., Aug 1994, Rapid Thermal and Integrated Processing III. Brueck, S. R. J., Gelpey, J. C., Green, M. L., Roozeboom, F. & Wortman, J. J. (eds.). Materials Research Society, Vol. .. p. 339-343 (MRS Symposium Proceedings Series; vol. 342).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 3
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  20. Published

    Fabrication of SIMOX Wafers by Plasma Immersion Ion Implantation

    Min, J., Chu, P. K., Cheng, Y. C., Iyer, S. & Cheung, N. W., Jun 1994, Conference Digest - INTERNATIONAL CONFERENCE ON PLASMA SCIENCE AND TECHNOLOGY' 94, CHENGDU. Liu, S., Wu, J. & Jin, Z. (eds.).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  21. 1993
  22. Published

    TOF-SIMS

    Chu, P. K., May 1993, p. 95-96.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  23. 1991
  24. Published

    REPRODUCIBILITY OF THE QUANTITATIVE SIMS ANALYSIS of [O] IN SILICON

    Goldstein, M., Bleiler, R. J. & Chu, P. K., Oct 1991, p. 479.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  25. Published

    Quantitative Determination of [O] in Silicon by SIMS - A Statistical Perspective

    Goldstein, M., Bleiler, R. J. & Chu, P. K., Sep 1991, p. 300.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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