Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1995
  2. Synthesis of buried oxide by plasma implantation with oxygen and water plasma

    Liu, J. B., Iyer, S. S. K., Min, J., Chu, P. K., Gronsky, R., Hu, C. & Chueng, N. W., 1995, IEEE International SOI Conference. IEEE, p. 166-167

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 8
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  3. 1994
  4. APPLICATIONS OF SIMS TO MICROELECTRONIC THIN FILMS

    Chu, P. K., Dec 1994, p. 59-68.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  5. Determination of sub-parts per billion boron contamination in N+ Czochralski silicon substrates by SIMS

    Chu, P. K., Bleiler, R. J. & Metz, J. M., Dec 1994, In: Journal of the Electrochemical Society. 141, 12, p. 3453-3456

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  6. Published

    FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)

    LIU, J. B., IYER, S. S. K., MIN, J., CHU, P., GRONSKY, R., HU, C. & CHEUNG, N. W., Dec 1994, In: Materials Research Society Symposium - Proceedings. 354, p. 117-121

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  7. Published

    Metallization of GaN Thin Films Prepared by Ion Beam Assisted Molecular Beam Epitaxy

    Chan, J., Fu, T., Cheung, N., Newman, N., Liu, X., Ross, J., Rubin, M. & 1 others, Chu, P., Dec 1994, In: Materials Research Society Symposium - Proceedings. 339, p. 223-227

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 1
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  8. STATISTICAL PROCESS CONTROL (SPC) FOR AFM MICROROUGHNESS MEASUREMENTS

    Chu, P. K., Brigham, R. G. & Baumann, S. M., Dec 1994, p. 253-258.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  9. SURFACE ANALYSIS OF INORGANIC AND ORGANIC PARTICLES AND CONTAMINANTS ON SILICON WAFERS

    Chu, P. K., Odom, R. W., Chakel, J. A. & Reich, D. F., Dec 1994, p. 259-264.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  10. ANOMALOUS IRON AND CHROMIUM CONTAMINATION FROM BOE

    Chu, P. K., Hockett, R. S. & Metz, J. M., Nov 1994, p. 74-80.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  11. DETECTION OF HIGH OXYGEN AND CARBON CONTENTS IN SEMI-INSULATING GALLIUM ARSENIDE EPITAXIAL LAYERS GROWN BY MOLECULAR BEAM EPITAXY AT LOW TEMPERATURE

    LAU, W. S., CHU, P. K., GOO, C. H. & CHONG, T. C., Nov 1994, p. 179-182.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  12. Published

    Shallow Junction Formation by Epitaxial Cobalt Silicide as Diffusion Source

    Fang, H., Li, B., Shao, K., Gu, Z., Huang, W., Jiang, G., Liu, P. & 2 others, Zhou, Z. & Chu, P. K., Nov 1994, p. 347-350.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  13. Published

    SYNTHESIS AND CHARACTERIZATION OF SIMOX BY PIII

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. & Cheung, N. W., Nov 1994, p. 238-240.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  14. Published

    Rapid Thermal Processing of Shallow Junctions Using Epitaxial CoSi2 as a Doping Source

    Jones, E. C., Ogawa, S., Ameika, P., Dass, M. L. A., Fraser, D. B., Chu, P. & Cheung, N. W., Aug 1994, Rapid Thermal and Integrated Processing III. Brueck, S. R. J., Gelpey, J. C., Green, M. L., Roozeboom, F. & Wortman, J. J. (eds.). Materials Research Society, Vol. .. p. 339-343 (MRS Symposium Proceedings Series; vol. 342).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 3
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  15. SIMS and microelectronics

    Chu, P. K., Aug 1994, In: Materials Chemistry and Physics. 38, 3, p. 203-223

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)62_Review of books or of software (or similar publications/items)peer-review

    Scopus citations: 10
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  16. Published

    Fabrication of SIMOX Wafers by Plasma Immersion Ion Implantation

    Min, J., Chu, P. K., Cheng, Y. C., Iyer, S. & Cheung, N. W., Jun 1994, Conference Digest - INTERNATIONAL CONFERENCE ON PLASMA SCIENCE AND TECHNOLOGY' 94, CHENGDU. Liu, S., Wu, J. & Jin, Z. (eds.).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  17. New ways to characterize thin films

    Chu, P. K. & Hockett, R. S., Jun 1994, In: Semiconductor International. 17, 6

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  18. 1993
  19. Quantitative detection of oxygen contamination related traps in gallium arsenide epitaxial layer grown by molecular beam epitaxy at low temperature

    Lau, W. S., Goo, C. H., Chong, T. C. & Chu, P. K., Sep 1993, In: Japanese Journal of Applied Physics. 32, 9, p. L1192-L1195

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  20. MEASUREMENT OF BORON CONTAMINATION IN N+ SILICON SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY

    Chu, P. K., Bleiler, R. J., Metz, J. M., Hitzman, C. J. & Hockett, R. S., May 1993, In: Electrochemical Society Extended Abstracts. 93-1

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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  21. Published

    TOF-SIMS

    Chu, P. K., May 1993, p. 95-96.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)31B_Invited conference paper (non-refereed items)Yes

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  22. 1992
  23. IMPROVEMENTS IN THE TECHNOS TREX AND NEW TXRF APPLICATIONS

    HOCKETT, R. S. & CHU, P. K., Oct 1992, The Proceedings of the Third International Conference on Solid State and Integrated Circuit Technology. Ellwanger, R., Chuang, C. T., Wang, Y. & Mo, B. (eds.). Publishing House of Electronics Industry, p. 262-264

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  24. 1991
  25. Published

    REPRODUCIBILITY OF THE QUANTITATIVE SIMS ANALYSIS of [O] IN SILICON

    Goldstein, M., Bleiler, R. J. & Chu, P. K., Oct 1991, p. 479.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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